Enhancement of sliding life of MoS2 films deposited by combining sputtering and high-energy ion implantation

Abstract

Solid lubricant films of MoS2 with improved adhesion to a stainless-steel substrate have been deposited by a combination of rf sputtering and ion implantation with inert gas ions in the 100-keV region. When the sputter film had obtained a thickness of 500 Å, it was subjected to the ionic bombardment prior to completion of the sputter deposition. Dependent on the ion dose an adhesion improvement and a sliding life enhancement of approximately a factor of 2 were obtained for the solid lubricant film.