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Microstructure and mechanical properties of hard Ti–Si–C–N films deposited by dc magnetron sputtering of multicomponent Ti/C/Si target

Materials ScienceDc Magnetron SputteringHard Ti–si–c–n FilmsEngineeringMechanical EngineeringApplied PhysicsMulticomponent Ti/c/si TargetThin Film Process TechnologyThin FilmsThin Film ProcessingMicrostructure