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Codoped (AlN) and monodoped (Al) ZnO thin films grown by RF sputtering: A comparative study

Materials ScienceMaterials EngineeringAluminium NitrideMaterial AnalysisEngineeringNanotechnologyOxide ElectronicsSurface ScienceApplied PhysicsZno Thin FilmsThin FilmsComparative StudyRf SputteringThin Film Processing