Publication | Closed Access
Residual stresses in Pb(Zr0.52Ti0.48)O3 thin films deposited by metal organic decomposition
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Citations
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References
2003
Year
Materials EngineeringMaterials ScienceMaterial AnalysisEngineeringOxide ElectronicsSurface ScienceApplied PhysicsResidual StressThin Film Process TechnologyThin FilmsMetal Organic DecompositionO3 Thin FilmsResidual StressesMicrostructureThin Film Processing
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