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Effect of substrate temperature on the structural and optical properties of ZnO and Al-doped ZnO thin films prepared by dc magnetron sputtering

Materials ScienceMaterials EngineeringAluminium NitrideOptical MaterialsEngineeringOptical PropertiesOxide ElectronicsSubstrate TemperatureApplied PhysicsDc MagnetronThin FilmsPulsed Laser DepositionOptoelectronicsThin Film Processing