Plasma- and vacuum-ultraviolet (VUV) photo-polymerisation of N- and O-rich thin films - Concepedia

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Plasma- and vacuum-ultraviolet (VUV) photo-polymerisation of N- and O-rich thin films

30

Citations

13

References

2009

Year

Juan‐Carlos Ruiz, Pierre‐Luc Girard‐Lauriault, Florina Truica‐Marasescu, M. R. Wertheimer

Radiation Physics and Chemistry

Materials ScienceEngineeringPhotochemistryO-rich Thin FilmsApplied PhysicsPhotopolymer NetworkThin FilmsChemical Vapor DepositionPlasma ProcessingThin Film Processing

References

	Year	Citations

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