Publication | Closed Access
Chemical Nucleation for CVD Diamond Growth
12
Citations
37
References
2001
Year
EngineeringDiamond LayersCrystal Growth TechnologyChemistryPlasma ProcessingNanoelectronicsNucleationChemical NucleationMicrowave Plasma CvdMaterials ScienceMaterials EngineeringPhysicsNanotechnologyNew Nucleation MethodDiamond-like CarbonNatural SciencesSurface ScienceApplied PhysicsChemical KineticsChemical Vapor Deposition
A new nucleation method to form diamond by chemically pretreating silicon (111) surfaces is reported. The nucleation consists of binding covalently 2,2-divinyladamantane molecules on the silicon substrate. Then low-pressure diamond growth was performed for 2 h via microwave plasma CVD in a tubular deposition system. The resulting diamond layers presented a good cristallinity and the Raman spectra showed a single very sharp peak at 1331 cm(-1), indicating high-quality diamonds.
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