Deposition of diamond-like carbon films by electrolysis of methanol solution

Abstract

By electrolysis of the methanol solution, an attempt was made to deposit diamondlike carbon (DLC) films on silicon substrate at temperature of less than 60 °C. Substrates were negatively biased with a dc potential of 0 to −3000 V. IR spectra showed that the O–H, C–H, and C–O vibration bands of electrolyte decreased remarkably after electrolysis and a new peak characterized as the C=C bond appeared. The deposited films were characterized as DLC films by Raman spectroscopy.