Concepedia

Publication | Closed Access

Surface investigation of plasma HMDSO membranes post-treated by CF4/Ar plasma

DOI

41

Citations

12

References

2002

Year

Éric Finot, S. Roualdès, Michal Kirchner, V. Rouessac, R. Berjoan, J. Durand, J-P. Goudonnet, L. Cot
Applied Surface Science

References

YearCitations

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