Optical Waveguide of MeV Hydrogen Ion Implanted KTiOPO₄

Abstract

The first MeV hydrogen ion implanted waveguide in KTiOPO 4 is reported. The planar optical waveguide in KTiOPO 4 was fabricated by 1.0 MeV hydrogen ions to a dose of 2×10 16 ions/cm 2 at room temperature. The dark modes were observed by prism coupling. Both refractive index profiles before and after annealing show a typical barrier waveguide in KTiOPO 4 formed by 1.0 MeV hydrogen ion implantation. After annealing at 200°C for 30 min, a 0.4% decrease in the refractive index was observed. Loss is estimated to be less than 2.2 dB/cm.