Direct Conversion of Titanium Alkoxide into Crystallized TiO₂ (rutile) Using Coating Photolysis Process with ArF Excimer Laser

Abstract

TiO 2 (rutile) films have been successfully prepared by the coating photolysis process using ArF excimer laser irradiation at room temperature. The choice of the Ti-alkoxide type as the starting material and the effects of atmosphere on the product films have been studied by Fourier transformation infrared (FT-IR) and X-ray diffraction (XRD). When using Ti(O-i-C 3 H 7 ) 4 as the starting material, rutile films were obtained by the irradiation in a dry N 2 atmosphere, whereas amorphous films were obtained by irradiation in air. When using Ti(OCH 2 CH(C 2 H 5 )-n-C 4 H 9 ) 4 as a starting material, rutile films were obtained by the irradiation even in the air atmosphere. Crystallization mechanism is also discussed.