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Morphological, structural and mechanical properties of NbN thin films deposited by reactive magnetron sputtering

Materials ScienceMaterials EngineeringMagnetismMaterial AnalysisEngineeringMechanical PropertiesMagnetic MaterialMechanical EngineeringApplied PhysicsSurface ScienceMagnetic Thin FilmsThin FilmsNbn Thin FilmsThin Film ProcessingReactive Magnetron SputteringMagnetic Medium