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Influence of substrate bias voltage on structure and properties of the CrAlN films deposited by unbalanced magnetron sputtering

Materials ScienceMagnetismElectrical EngineeringMaterials EngineeringEngineeringApplied PhysicsCraln FilmsSubstrate Bias VoltageThin Film Process TechnologyMicroelectronicsUnbalanced Magnetron SputteringThin Film Processing