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Synthesis, crystal structure and thermal decomposition of [La2(CH3CH2COO)6·(H2O)3]·3.5H2O precursor for high-k La2O3 thin films deposition

Materials ScienceCrystal StructureEngineeringOxide ElectronicsThermal DecompositionThin Film Process TechnologyChemistryThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing