Effect of plasma hydrogenation on the defect properties of CuInSe₂single crystals

Abstract

Abstract The defect properties of p‐type CuInSe 2 single crystals hydrogenated by diffusion from a plasma source are investigated using the Rutherford backscattering/channeling technique and photoacoustic spectroscopy. Plasma hydrogenation is found to produce severe lattice damage, to affect the intrinsic defect equilibrium in the near surface region of the crystals and to create an additional donor. A defect formation model including both defect passivation by hydrogen and damage induced defect creation is proposed to explain the experimental data. The thermal stability of the property modifications is limited to temperatures below about 100 °C.