Effect of Xe+ ion bombardment during titanium deposition in nitrogen atmosphere

Quantitative auger electron analysis of titanium nitrides

P. T. Dawson, K.K. Tzatzov · Surface Science · 1985 · 137 citations

Natural Sciences, Chemistry, Materials Science +13

Interface stress of Al<i>x</i>Ga1−<i>x</i>As–GaAs layer structures

F. K. Reinhart, R. A. Logan · Journal of Applied Physics · 1973 · 131 citations

Engineering, Materials Engineering, Materials Science +17

X-ray measurement of elastic strain and annealing in semiconductors

Bat‐El Cohen, M. W. Focht · Solid-State Electronics · 1970 · 42 citations

Natural Sciences, Materials Engineering, Materials Science +14

The influence of ion bombardment on reactions between Ti and gaseous N2

R. A. Kant, B.D. Sartwell · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 18 citations

Natural Sciences, Chemistry, Materials Science +13

Nitride formation at metal surfaces by Ar+ ion bombardment in nitrogen atmosphere

Yuji Baba, T.A. Sasaki · Materials Science and Engineering A · 1989 · 12 citations

Natural Sciences, Materials Engineering, Materials Science +12