Publication | Closed Access

Optimization of intrinsic hydrogenated amorphous silicon deposited by very high-frequency plasma-enhanced chemical vapor deposition using the relationship between Urbach energy and silane depletion fraction for solar cell application

Electrical EngineeringEngineeringSolar Cell ApplicationApplied PhysicsAmorphous SiliconAmorphous SolidChemical Vapor DepositionPlasma ProcessingPhotovoltaicsSilicon On InsulatorUrbach Energy