Preparation of Quantum Hall Effect Device Arrays

Abstract

The preparation of quantum Hall effect device arrays at the PTB using multiterminal connections has been improved by the use of SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> as insulation material for the multilayer connections. The used lay-out avoids connections crossing the active sections of the devices. Arrays with ten devices in series as well as in parallel have been realised and successfully tested