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Effects of periodicity and oxygen partial pressure on the crystallinity and dielectric property of artificial SrTiO3/BaTiO3 superlattices integrated on Si substrates by pulsed laser deposition method

Materials ScienceEngineeringDielectric PropertyFerroelectric ApplicationOxide ElectronicsApplied PhysicsPulsed Laser DepositionArtificial Srtio3/batio3 SuperlatticesEpitaxial GrowthSilicon On InsulatorOxygen Partial Pressure