Determination of thickness and optical constants of thin films from photometric and ellipsometric measurements

Abstract

We describe a computational method of determining the optical constants n(λ),k(λ) and the film thickness d from photometric R(λ),T(λ) and ellipsometric Ψ(λ),Δ(λ) data. Combinations of three or four of the measured quantities are compared using Newton-Raphson and Simplex techniques. The method is applied to thin films of gold and amorphous metallic alloys. The results are discussed.