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The effect of titanium current on structure and hardness of aluminium titanium nitride deposited by reactive unbalanced magnetron co-sputtering

Materials EngineeringMaterials ScienceEngineeringCorrosionAluminium TitaniumMechanical EngineeringApplied PhysicsAlloy DesignLight MetalAlloy CastingHigh-performance MetalMicrostructureMetal Processing