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Role of annealing temperature on microstructural and electro-optical properties of ITO films produced by sputtering

Materials ScienceMaterials EngineeringElectrical EngineeringEngineeringElectro-optical PropertiesOptical PropertiesSurface ScienceApplied PhysicsIto FilmsThin FilmsPulsed Laser DepositionChemical DepositionOptoelectronicsChemical Vapor DepositionThin Film Processing