Concepedia

High-density DLC films prepared using a magnetron sputter type negative ion source

Namwoong Paik

Diamond and Related Materials · 2004 · 11 citations · 14 references

DOI

Concepts

References

14

Thermodynamic approach to the quantitative interpretation of sputtered ion mass spectra

Charles A. Andersen, James Hinthorne · Analytical Chemistry · 1973 · 436 citations

, , +9

Secondary-ion emission probability in sputtering

Jens K. Nørskov, Bengt I. Lundqvist · Physical review. B, Condensed matter · 1979 · 383 citations

, , +13

Velocity Dependence of the Ionization Probability of Sputtered Atoms

Ming L. Yu · Physical Review Letters · 1981 · 169 citations

, , +12

Requirements of ultrathin carbon coatings for magnetic storage technology

John Robertson · Tribology International · 2003 · 114 citations

, , +14

A survey of negative ions from a cesium sputter source

R. Middleton · Nuclear Instruments and Methods · 1977 · 106 citations

, , +8