Publication | Closed Access
High-rate deposition of plasma polymerized thin films using PECVD method and characterization of their optical properties
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Citations
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References
2003
Year
Materials ScienceOptical MaterialsEngineeringOptical PropertiesPolymer ScienceApplied PhysicsPecvd MethodHigh-rate DepositionChemical Vapor DepositionThin FilmsPulsed Laser DepositionPlasma ProcessingPolymer ChemistryThin Film Processing
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