Study of the structural evolutions of crystalline tungsten oxide films prepared using hot-filament CVD

Abstract

Structural evolutions of tungsten oxide(WO3) samples on different substrates are studied using Raman spectroscopy, scanning electron microscopy, energy dispersive spectroscopy, x-ray diffraction and x-ray photoelectron spectroscopy. The WO3 samples are prepared using hot-filament CVD techniques. The focus of the study is on the evolutions of nano structures at different stages following deposition time. The experimental measurements reveal evolutions of the surface structures from uniform film to fractal-like structures, and eventually to nano particles, and crystalline structures from mono (0 1 0) crystalline thin film to polycrystalline thick film developments. The effect of high temperature on the nanostructured WO3 is also investigated. Well-aligned nanoscale WO3 rod arrays are obtained at a substrate temperature of up to 1400 °C. Further increasing the substrate temperature yields microscale crystalline WO3 particles.