Publication | Closed Access
III‐V/silicon photonics for on‐chip and intra‐chip optical interconnects
521
Citations
47
References
2010
Year
Optical MaterialsEngineeringSilicon Waveguide PlatformIntegrated PhotonicsMolecular Wafer BondingDevice IntegrationOptoelectronic DevicesIntegrated CircuitsSilicon On InsulatorIii‐v/soi IntegrationWafer Scale ProcessingPhotonic Integrated CircuitPhotonicsOptical InterconnectsMicroelectronicsPhotonic DeviceSilicon PhotonicsThree-dimensional Heterogeneous IntegrationApplied PhysicsOptoelectronicsOptical DevicesIii‐v/silicon Photonics
Abstract In this paper III‐V on silicon‐on‐insulator (SOI) heterogeneous integration is reviewed for the realization of near infrared light sources on a silicon waveguide platform, suitable for inter‐chip and intra‐chip optical interconnects. Two bonding technologies are used to realize the III‐V/SOI integration: one based on molecular wafer bonding and the other based on DVS‐BCB adhesive wafer bonding. The realization of micro‐disk lasers, Fabry‐Perot lasers, DFB lasers, DBR lasers and mode‐locked lasers on the III‐V/SOI material platform is discussed.
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