Publication | Closed Access
Impact ionization in semiconductors: Effects of high electric fields and high scattering rates
90
Citations
10
References
1992
Year
SemiconductorsElectrical EngineeringIon ImplantationEngineeringPhysicsHigh Scattering RatesThreshold EnergyNatural SciencesApplied PhysicsCondensed Matter PhysicsCollision BroadeningImpact IonizationIon BeamElectric FieldHigh Electric FieldsQuantum ChemistryIon EmissionMicroelectronics
We present a theory of impact ionization in semiconductors that expands an earlier theory of Kane and includes the effects of high electric fields and high scattering rates on the electron-electron collision process. We show that their combined effect, i.e., the intracollisional field effect and collision broadening, leads to a softening of the threshold energy for impact ionization and a marked increase in the anisotropy of the ionization rate with respect to the direction of the electric field.
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