Modeling of multilayer piezoelectric structures

Abstract

Abstract Based on the classical K.L.M. equivalent circuit for a piezoelectric ceramic and a matrix formulation, a method to model the electro-acoustic behavior of multilayer piezoelectric structures is described. In this iterative implementation, valid for any number of active layers, different external elements can be inserted such as electrodes and bond layers. Both types of electrical connections between successive layers (i.e. in series or in parallel) can be defined. Finally, a three layer structure is fabricated, characterized and the results are compared with theoretical predictions.