The structure and properties of CrAlN films deposited by mid-frequency unbalanced magnetron sputtering at different substrate bias duty cycles - Concepedia

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The structure and properties of CrAlN films deposited by mid-frequency unbalanced magnetron sputtering at different substrate bias duty cycles

29

Citations

36

References

2012

Year

Yanhong Lv, Li Ji, Xiaohong Liu, Hongxuan Li, Huidi Zhou, Jianmin Chen

Surface and Coatings Technology

Materials EngineeringMagnetismMaterials ScienceEngineeringPhysicsMid-frequency Unbalanced MagnetronApplied PhysicsCraln FilmsThin Film ProcessingMagnetic Medium

References

	Year	Citations

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