Publication | Closed Access
Two-component solution processing of oxide semiconductors for thin-film transistors via self-combustion reaction
71
Citations
35
References
2014
Year
EngineeringFuel ScienceChemistrySemiconductor DeviceSemiconductorsChemical EngineeringTwo-component Solution ProcessingZn PrecursorsThin Film ProcessingMaterials ScienceElectrical EngineeringOxide ElectronicsOxide SemiconductorsSemiconductor Device FabricationCatalysisSelf-combustion ReactionHeterogeneous CombustionApplied PhysicsOxidizer Ligands
The self-combustion of In and Zn precursors coordinated with fuel and oxidizer ligands is utilized for high performance IZO TFTs.
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