Structure, stability and bonding of ternary transition metal nitrides

Generalized Gradient Approximation Made Simple

John P. Perdew, Kieron Burke, Matthias Ernzerhof · Physical Review Letters · 1996 · 211.5K citations · Full text

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Development of preferred orientation in polycrystalline TiN layers grown by ultrahigh vacuum reactive magnetron sputtering

J. E. Greene, J.‐E. Sundgren, Lars Hultman et al. · Applied Physics Letters · 1995 · 395 citations

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Stress and preferred orientation in nitride-based PVD coatings

G. Abadias · Surface and Coatings Technology · 2007 · 272 citations

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Reactive sputter deposition of TiN layers: modelling the growth by characterization of particle fluxes towards the substrate

Stijn Mahieu, Diederik Depla · Journal of Physics D Applied Physics · 2009 · 170 citations

Natural Sciences, Materials Engineering, Materials Science +16

Surface kinetics and subplantation phenomena affecting the texture, morphology, stress, and growth evolution of titanium nitride films

P. Patsalas, C. Gravalidis, S. Logothetidis · Journal of Applied Physics · 2004 · 140 citations

Natural Sciences, Materials Engineering, Materials Science +17