The surface ionisation function ϕ(0) derived using a Monte Carlo method. (Correction procedure development for electron-probe microanalysis)

Abstract

Values of the surface ionisation function phi (0) are calculated for a wide range of elements and overvoltages using a Monte Carlo program which simulates electron interactions in solids. From the data it is shown that phi (0) is simply a function of electron back-scatter coefficient and overvoltage, and an analytical expression for phi (0) is derived in terms of these parameters. Values of phi (0) obtained using the expression are compared with previous results.