Study of mechanical properties of PVD ZrN films, deposited under positive and negative substrate bias conditions - Concepedia

Concepedia

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Study of mechanical properties of PVD ZrN films, deposited under positive and negative substrate bias conditions

37

Citations

14

References

2004

Year

Chengshi Chen, Chuan‐Pu Liu, C.–Y.A. Tsao, Heng-Ghieh Yang

Scripta Materialia

Materials ScienceMaterials EngineeringPvd Zrn FilmsEngineeringMechanical PropertiesApplied PhysicsPhotovoltaics

References

	Year	Citations

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