The sensitivity of gas sensor based on single ZnO nanowire modulated by helium ion radiation

Abstract

In this letter, we present a gas sensor using a single ZnO nanowire as a sensing unit. This ZnO nanowire-based sensor has quick and high sensitive response to H2S in air at room temperature. It has also been found that the gas sensitivity of the ZnO nanowires could be modulated and enhanced by He+ implantation at an appropriate dose. A possible explanation is given based on the modulation model of the depletion layer.