Concepedia

Publication | Closed Access

Influence of substrate bias on the structure and properties of ZrN films deposited by cathodic vacuum arc

DOI

41

Citations

25

References

2007

Year

E. Niu, L. Li, Guohua Lv, Hao Chen, Wenran Feng, Songhua Fan, Xiaodong Yang
Materials Science and Engineering A

References

YearCitations

Page 1