Optimum location of silicide/Si interface in ultra-thin body SOI MOSFETs with recessed and elevated silicide source/drain contact structure - Concepedia

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Optimum location of silicide/Si interface in ultra-thin body SOI MOSFETs with recessed and elevated silicide source/drain contact structure

16

Citations

8

References

2009

Year

Solid-State Electronics

Electrical EngineeringEngineeringNanoelectronicsApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsBeyond CmosOptimum LocationSemiconductor DeviceSilicide/si Interface

References

	Year	Citations

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