Concepedia

Publication | Closed Access

Selective nucleation in silicon moulds for diamond MEMS fabrication

DOI

29

Citations

11

References

2009

Year

Alexandre Bongrain, Emmanuel Scorsone, Lionel Rousseau, Gaëlle Lissorgues, C. Gesset, Samuel Saada, P. Bergonzo
Journal of Micromechanics and Microengineering

Abstract

International audience

References

YearCitations

Page 1