On the Reaction Mechanism of the Pyrolyses of TMG and TEG in MOCVD Growth Reactors

Abstract

The differentiation of the plausible mechanism for the thermal decompositions of TMG and TEG taking place in MOCVD growth reactors was carried out by means of the quantum theoretical method using ab initio molecular orbital calculations. It was found that the combination of the radical mechanism for TMG, Ga(CH 3 ) 3 – Δ ·Ga(CH 3 ) 2 +·CH 3 , and the molecular mechanism for TEG, Ga(C 2 H 5 ) 3 – Δ GaH(C 2 H 5 ) 2 +C 2 H 4 , explains qualitatively the experiment on the pyrolysis temperatures of TMG and TEG in the MOCVD growth reactor.