Publication | Closed Access
Probing the Lithium Ion Storage Properties of Positively and Negatively Carved Silicon
39
Citations
35
References
2011
Year
EngineeringPrepared Si ElectrodesSi PillarSilicon On InsulatorNanoelectronicsEnergy Storage DeviceMaterials ScienceElectrical EngineeringBattery Electrode MaterialsAdvanced Electrode MaterialLithium-ion BatteryEnergy StorageSemiconductor Device FabricationSolid-state BatteryMicroelectronicsElectrochemistryLi-ion Battery MaterialsApplied PhysicsSi Electrodes
Here, we report Si pillar and well arrays as tailored electrode materials for advanced Li ion storage devices. The well-ordered and periodic morphologies were formed on a Si electrode thin film via laser interference lithography followed by a dry etch process. Two different patterns of negatively or positively carved Si electrodes exhibited highly improved cycle performance as a consequence of the enlarged surface area and the nanoscale pattern effects. The Si well arrays showed the highest energy density, rate capability, and cycling retention among the prepared Si electrodes. This tailored electrode platform demonstrates that these design principles could be applied to future developments in Si electrodes.
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