Investigation of the nucleation mechanism in bias-enhanced diamond deposition on silicon and molybdenum - Concepedia

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Investigation of the nucleation mechanism in bias-enhanced diamond deposition on silicon and molybdenum

24

Citations

15

References

1995

Year

Petra Reinke, P. Kania, P. Oelhafen

Thin Solid Films

Materials ScienceDiamond-like CarbonEngineeringNucleation MechanismNanotechnologyApplied PhysicsBias-enhanced Diamond DepositionSemiconductor Device FabricationChemical Vapor Deposition

References

	Year	Citations

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