Influence of the calcium phosphate content of the target on the phase composition and deposition rate of sputtered films - Concepedia

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Influence of the calcium phosphate content of the target on the phase composition and deposition rate of sputtered films

39

Citations

28

References

2006

Year

Kazuhiko Ozeki, Yasuhiro Fukui, Hideyuki Aoki

Applied Surface Science

Materials ScienceEngineeringCalcium Phosphate ContentSurface ScienceApplied PhysicsPhase CompositionDeposition RateThin FilmsPulsed Laser DepositionChemical DepositionChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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