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Nanocomposite Ti–Si–N, Zr–Si–N, Ti–Al–Si–N, Ti–Al–V–Si–N thin film coatings deposited by vacuum arc deposition

Materials ScienceEngineeringSurface ScienceApplied PhysicsVacuum Arc DepositionThin Film DevicesThin Film Process TechnologyThin FilmsNanocomposite Ti–si–nChemical DepositionChemical Vapor DepositionThin Film ProcessingThin-film Technology