Publication | Closed Access
Growth of high quality AlN thin films on diamond using TiN/Ti buffer layer
14
Citations
9
References
2005
Year
Materials ScienceMaterials EngineeringDiamond-like CarbonAluminium NitrideEngineeringSurface ScienceApplied PhysicsTin/ti Buffer LayerThin FilmsChemical Vapor DepositionThin Film Processing
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