A hard x-ray KB-FZP microscope for tomography with sub-100-nm resolution

Abstract

An instrument for high-resolution imaging and tomography has been built at the APS beamline 34 ID-C, Argonne National Laboratory. In-line phase contrast tomography can be performed with micrometer resolution. For imaging and tomography with resolution better than 100nm a hard X-ray microscope has been integrated to the instrument. It works with a Kirkpatrick-Baez (KB) mirror as condenser and a Fresnel-Zone plate (FZP) as an objective lens. 50 nm-features have been resolved in a Nickel structure operating the microscope at a photon energy of 9keV. Phase objects with negligible absorption contrast have been imaged. Tomography scans were performed on photonic crystals.