Reactions of laser-generated CF2 on silicon and silicon oxide surfaces - Concepedia

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Reactions of laser-generated CF2 on silicon and silicon oxide surfaces

27

Citations

16

References

1989

Year

J.G. Langan, Jeffrey A. Shorter, Xin Xu, Stephen A. Joyce, J. I. Steinfeld

Surface Science

Materials ScienceAdvanced Laser ProcessingOptical MaterialsEngineeringLaser PhotochemistrySurface ScienceApplied PhysicsLaser Processing TechnologyLaser-generated Cf2Laser-assisted DepositionSilicon On InsulatorLaser-surface Interactions

References

	Year	Citations

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