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Optimization of the optical and electrical properties of electron beam evaporated aluminum-doped zinc oxide films for opto-electronic applications

Materials ScienceIi-vi SemiconductorElectrical EngineeringOptical MaterialsEngineeringElectron BeamOptical PropertiesOxide ElectronicsApplied PhysicsGallium OxideAluminum-doped ZincOptical CeramicThin Film Process TechnologyThin FilmsElectrical PropertiesOptoelectronics