The effects of deposition parameters on the structure and properties of titanium-containing DLC films synthesized by cathodic arc plasma evaporation - Concepedia

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The effects of deposition parameters on the structure and properties of titanium-containing DLC films synthesized by cathodic arc plasma evaporation

62

Citations

25

References

2008

Year

Pi‐Chuen Tsai, Yen-Fei Hwang, Jueh-Yu Chiang, W.J. Chen

Surface and Coatings Technology

Materials EngineeringMaterials ScienceEngineeringDeposition ParametersSurface ScienceApplied PhysicsChemical Vapor DepositionThin FilmsChemical DepositionTitanium-containing Dlc FilmsPlasma ProcessingThin Film Processing

References

	Year	Citations

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