Modeling and simulation of SiC CVD in the horizontal hot-wall reactor concept - Concepedia

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Modeling and simulation of SiC CVD in the horizontal hot-wall reactor concept

64

Citations

20

References

2004

Year

Jérôme Mezière, M. Ucar, E. Blanquet, M. Pons, P. Ferret, L. Di Cioccio

Journal of Crystal Growth

Electrical EngineeringEngineeringSic CvdHigh Voltage EngineeringThermal HydraulicsReactor PhysicsHeat TransferFusion Reactor Material

References

	Year	Citations

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