Enhancement of moisture resistance of spin-on low-k HSQ films by hot wire generated atomic hydrogen treatment - Concepedia

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Enhancement of moisture resistance of spin-on low-k HSQ films by hot wire generated atomic hydrogen treatment

12

Citations

3

References

2005

Year

Alka Kumbhar, Sunil Kumar Singh, Rajiv O. Dusane

Thin Solid Films

Materials ScienceEngineeringAtomic Hydrogen TreatmentSurface ScienceApplied PhysicsMoisture ResistanceHot WireHydrogen

References

	Year	Citations

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