The Monte Carlo technique as applied to the fundamentals of EPMA and SEM

Abstract

A Monte Carlo technique was applied to study the fundamental phenomena in the electron probe microanalyzer (EPMA) and the scanning electron microscope (SEM), which are brought about by scattering of the primary electrons in a specimen. The calculation procedure was based on Lewis' multiple scattering theory; however, some attempts were made to improve it by introducing the substeps to each step which had been used in previous calculations. The main purpose is to investigate the applicability of this improvement through the comparison with the experimental results with respect to backscattered electrons obtained by Kanter, and next to give a theoretical explanation for the experimental results of Wells as well as to obtain more detailed information on the electron backscattering. The results show that the fidelity of the present Monte Carlo simulation for the electron backscattering is satisfactory.